Influence of nitrogen concentration on electrical, mechanical, and structural properties of tantalum nitride thin films prepared via DC magnetron sputtering

👤 Davoud Dastan; Ke Shan; Azadeh Jafari; Farzan Gity; Xi-Tao Yin; Zhicheng Shi; Najlaa D. Alharbi; Bilal Ahmad Reshi; Wenbin Fu; Ştefan Ţălu; Loai Aljerf; Hamid Garmestani et al. 🗓️ 2022

المصدر: Applied Physics A · الاستشهادات (Scopus): 51